Yuchi Vacuum | Scientific Research Innovation – Focusing on the R&D and Production of Domestic Vacuum Components

In recent years, with the continuous expansion of vacuum technology applications in China, various types of vacuum acquisition equipment have developed rapidly. To meet the application needs of customers across different industries for product integration, intelligence, and convenience, Yuchi Vacuum continues to drive innovation and technological advancement in its products. Its solutions are widely applied in semiconductors, optical coating, vacuum glass, lithium batteries, photovoltaics, panels, and other high-end manufacturing sectors.

A molecular pump is a type of vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, giving them directional velocity, thereby compressing and driving them toward the exhaust port to be removed by a backing pump. Various semiconductor manufacturing processes must be carried out in the high-vacuum environment maintained by molecular pumps, which imposes strict requirements on the cleanliness of vacuum systems and equipment.

Yuchi Vacuum possesses extensive experience in R&D, industrialization engineering research, and implementation. Through years of dedicated work in the vacuum field, the company has filled gaps in the R&D and production of domestic vacuum components. It has also strengthened industry-academia-research cooperation alliances and accumulated rich experience in technical collaboration with domestic research institutes. Molecular pumps have a wide range of applications; driven by the semiconductor industry, their market penetration is accelerating in critical equipment such as lithography machines, thin-film deposition equipment, etching equipment, and ion implanters.

Backed by solid technological reserves, the company team developed the first integrated-rotor composite molecular pump in 2005, launched the FFD composite molecular pump capable of arbitrary-angle installation in 2010, participated in the major national instrument project "Development of High-Speed Magnetic Levitation Molecular Pump" in 2012, developed the world's first MDP atmospheric-impact-resistant composite molecular pump in 2013, produced China's first 400-port magnetic levitation molecular pump in 2016, released China's first 400-port arbitrary-angle-installation composite molecular pump in 2018, applied the first industrialized magnetic levitation molecular pump engineering prototype to the semiconductor industry in 2020–2021, and from 2022 to 2023, launched a series of products with performance comparable to foreign magnetic levitation molecular pumps.

Yuchi Vacuum's main products are magnetic levitation turbomolecular pumps and mechanical bearing turbomolecular pumps. The company's team has focused on the molecular pump field for over two decades, having undertaken a major national scientific instrument project under the Ministry of Science and Technology. Driven by industry-academia-research integration, the company has innovatively developed a self-designed ultra-high vacuum, high-speed magnetic levitation composite molecular pump, achieving industrialized production of magnetic levitation ultra-high vacuum molecular pumps. This has accelerated the domestic substitution of high-end molecular pumps in China's semiconductor, new energy, new materials, and other sectors. In April 2025, Yuchi Vacuum established a joint R&D laboratory for tritium-compatible high-speed molecular pumps in cooperation with the Institute of Energy, Hefei Comprehensive National Science Center, marking the beginning of its R&D efforts in nuclear-grade molecular pumps and contributing to the future commercialization of nuclear fusion.

The company has now secured strategic investments from prominent industrial investors including Datang Telecom (600198.SH), CR Micro (688396.SH), Changjiang Innovation (000783.SZ), Loongson Technology (688047.SH), SDIC Venture Capital, Jihua Culai Investment, and Feitu Capital, officially entering the semiconductor industry.

Driven by enormous market demand, the industry has ushered in unprecedented development opportunities while simultaneously intensifying market competition. Yuchi Vacuum is committed to supporting the domestic localization of high-end vacuum equipment.