Yuchi Vacuum Technology Module - Premium Edition

About Yuchi Vacuum

Hefei Yuchi Vacuum Technology Co., Ltd. is a high-tech enterprise dedicated to commercializing the scientific and technological achievements of the National Key Special Project for Major Instruments and Meters of the Ministry of Science and Technology, namely the Ultra-high Vacuum High Pumping Speed Magnetic Levitation Compound Molecular Pump.

The company independently developed the ultra-high vacuum high pumping speed magnetic levitation compound molecular pump with proprietary intellectual property rights, realizing the industrialized mass production of magnetic levitation ultra-high vacuum molecular pumps.

Breaking reliance on imported high-end pumps

National Market R&D Layout

Beijing Sihai Xiangyun Fluid Technology Co., Ltd., our wholly-owned subsidiary, is a professional manufacturer specializing in the R&D and production of high-vacuum molecular pumps, holding dual high-tech enterprise certifications (National High-tech Enterprise & Zhongguancun High-tech Enterprise).

It has accumulated profound technical experience in the R&D and manufacturing of vacuum products (including conventional bearing molecular pumps). At present, mass production and market promotion of mechanical bearing molecular pumps have been achieved, while small-batch production of magnetic levitation molecular pumps is also available.

Fully Domestic R&D Team

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Research Personnel

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Years of Experience

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Annual Output (Units)

CORPORATE MILESTONES

Team & Corporate
Development Timeline

Leading the technological advancement in composite and magnetic levitation turbo pumps through continuous R&D.

2005

Developed China’s first integrated rotor composite turbo pump.

2010

Developed FFD turbo pump with arbitrary angle mounting capability.

2012

Co-undertaken the National Major Scientific Instrument Project with Beihang University: R&D of high pumping speed magnetic levitation composite turbo pumps under ultra-high vacuum conditions.

2013

Developed the world’s first MDP turbo pump resistant to atmospheric shock.

2015

Developed China’s first 400-caliber "integrated rotor composite" turbo pump.

2018

Developed China’s first 400-caliber turbo pump supporting arbitrary angle installation.

2022

Developed DN320 and DN250 caliber magnetic levitation turbo pumps, applied in semiconductor equipment.

2025

Co-established a joint R&D laboratory with the Institute of Energy, Hefei Comprehensive National Science Center, launching the R&D of nuclear-grade turbo pumps.

YUCHI VACUUM - Case Studies

// HEFEI YUCHI VACUUM TECHNOLOGY

CASE STUDIES

NATIONAL KEY INSTRUMENT R&D ACHIEVEMENT TRANSFORMATION ALL-DOMESTIC VACUUM PUMP CORE SOLUTIONS

R&D_TEAM 1 FULLY DOMESTIC | 15+ RESEARCHERS

INDUSTRY_EXPERIENCE 20+ YEARS

ANNUAL_OUTPUT 6,500+ UNITS

VACUUM_TECH // OPTICAL_COATING [STREAMING] // DATA_SYNC_ACTIVE

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01Industrial Applications of AR (Anti-Reflection) Coatings

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VACUUM_TECH // SEMICONDUCTOR [STREAMING] // DATA_SYNC_ACTIVE

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02Semiconductor Ion Implantation Equipment

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VACUUM_TECH // HJT_PVD [STREAMING] // DATA_SYNC_ACTIVE

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03HJT (Heterojunction) PVD Applications

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VACUUM_TECH // OPTICAL_DEPOSITION [STREAMING] // DATA_SYNC_ACTIVE

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04High-End Optical Deposition Equipment

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VACUUM_TECH // FPD_ETCHING [STREAMING] // DATA_SYNC_ACTIVE

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05Applications in FPD Etching & Deposition (Film Formation) Equipment

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VACUUM_TECH // OPTICAL_DEPOSITION [STREAMING] // DATA_SYNC_ACTIVE

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06High-End Optical Deposition Equipment

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VACUUM_TECH // SEMICONDUCTOR [STREAMING] // DATA_SYNC_ACTIVE

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07Applications in Semiconductor Ion Implantation Equipment

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VACUUM_TECH // ITO_GLASS [STREAMING] // DATA_SYNC_ACTIVE

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08Application of ITO Conductive Glass in the Industry

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VACUUM_TECH // PRODUCT_APP [STREAMING] // DATA_SYNC_ACTIVE

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09Applications of Yuchi Vacuum Products in the Industry

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// CORPORATE HONORS & QUALIFICATIONS

The enterprise holds National High-tech Enterprise & Anhui SRDI Enterprise certifications. Our R&D team and products have obtained a wide range of industry awards.